principle: vertical or horizontal asymmetric slit pairs
blade material: 2mm tungsten (others on request)
resolution: 0.884 μm at 400 steps/rev.
range: +/- 3mm
repeatability: < 0.5μm (typically < 0.2μm)
backlash: < 3μm
drive: Step motor controller
limit switch, home switch
dimension (in beam direction): 46mm
encoders: optional
atmosphere: He or vacuum (additional windows required)
available slit modules:
3100.20 horizontal
3100.21 vertical
Slit Screen 3100.20
Slit Screen 3100.20