We adopted the pneumatic system with a lot of actual achievement in the variety field from microscopy or laser application technology to semiconductor manufacture/inspection devices.
We assure you that you get excellent vibration isolation performance in the wide band of frequency from 3 Hz to hundreds Hz.
And rubber installed in the lower part of air spring protects the precise mechanism of a mounted machine in case of supply stop of air.
When a vibration isolation system is installed in a machine, it is required to occupy less space of the machine.
"AP Series" is a compact shaped unit type of isolation system that is composed of an air spring and a mechanical leveling valve.
You can install "AP Series" in a device without modifying the structure of the device on a large scale and can get good vibration isolation performance.