Though MAPS has compact size, it can isolate the vibration of six degrees of freedom
MAPS makes it possible to eliminate the vibration of frequency band width which passive system cannot.
A device of ten tons or more can be isolated from vibrations by a standard type of MAPS
It is steady even if a device on which stage works is carried.
MAPS is excellent in accurate positioning and precise leveling.
主动隔震平台明立MAPS
MAPS makes it possible to eliminate the vibration of frequency band width which passive system cannot.
