产品分类

SlitScreen

principle: vertical or horizontal asymmetric slit pairs

blade material: 2mm tungsten (others on request)

resolution: 0.884 μm at 400 steps/rev.

range: +/- 3mm

repeatability: < 0.5μm (typically < 0.2μm)

backlash: < 3μm

drive: Step motor controller

limit switch, home switch

dimension (in beam direction): 46mm

encoders: optional

atmosphere: He or vacuum (additional windows required)

available slit modules:

3100.20 horizontal

3100.21 vertical

Slit Screen 3100.20

Slit Screen 3100.20